This is the data file MPC61B.DAT. Source: This data is used to generate the graphs on page mpc614.htm of the e-Handbook. This is a case study of a gauge study for resistivity measurements. Data is from Carroll Croakin. Description: The data file MPC61.DAT contains resistivity measurements. This file contains the averages for the 5 wafers for each of run 1 and run 2 for one of the probes for six days. In addition, it includes the differences between these averages. See the MPC61.DAT header for background on the original data. Data: Column 1: Wafer ID (check standards 138, 139, 140, 141, 142) Column 2: Probe (only 2362 data included) Column 3: Month for Run 1 Column 4: Day for Run 1 Column 5: Resistivity for Run 1 Column 6: Month for Run 2 Column 7: Day for Run 2 Column 8: Resistivity for Run 2 Column 9: Difference in resistivity between run 1 and run 2 To read into Dataplot, enter SKIP 25 READ MPC61B.DAT WAFER PROBE MO1 DAY1 Y1 MO2 DAY2 Y2 DIFF WAFER PROBE MO1 DAY1 Y1 MO2 DAY2 Y2 DIFF --------------------------------------------------------------- 138. 2362. 3. 15. 95.1162 4. 12. 95.1687 -0.0525 138. 2362. 3. 17. 95.0569 4. 18. 95.1564 -0.0995 138. 2362. 3. 18. 95.0598 4. 19. 95.1354 -0.0756 138. 2362. 3. 22. 95.1487 4. 19. 95.0422 0.1065 138. 2362. 3. 23. 95.0743 4. 20. 95.1354 -0.0611 138. 2362. 3. 24. 95.1010 4. 21. 95.1075 -0.0065 139. 2362. 3. 15. 99.2939 4. 12. 99.3408 -0.0469 139. 2362. 3. 17. 99.3234 4. 18. 99.3116 0.0118 139. 2362. 3. 18. 99.2748 4. 19. 99.3241 -0.0493 139. 2362. 3. 22. 99.3512 4. 19. 99.2991 0.0521 139. 2362. 3. 23. 99.2350 4. 20. 99.3049 -0.0699 139. 2362. 3. 24. 99.3574 4. 21. 99.2782 0.0792 140. 2362. 3. 15. 96.0771 4. 12. 96.0793 -0.0022 140. 2362. 3. 17. 95.9976 4. 18. 96.1115 -0.1139 140. 2362. 3. 18. 96.0148 4. 19. 96.0803 -0.0655 140. 2362. 3. 22. 96.0397 4. 19. 96.0411 -0.0014 140. 2362. 3. 23. 96.0407 4. 20. 96.0988 -0.0581 140. 2362. 3. 24. 96.0445 4. 21. 96.0482 -0.0037 141. 2362. 3. 15. 101.0471 4. 12. 101.1353 -0.0882 141. 2362. 3. 17. 101.0224 4. 18. 101.1201 -0.0977 141. 2362. 3. 18. 101.0702 4. 19. 101.0946 -0.0244 141. 2362. 3. 22. 101.0904 4. 19. 100.9977 0.0927 141. 2362. 3. 23. 101.0626 4. 20. 101.0963 -0.0337 141. 2362. 3. 24. 101.0686 4. 21. 101.0300 0.0386 142. 2362. 3. 15. 94.2437 4. 12. 94.2052 0.0385 142. 2362. 3. 17. 94.2115 4. 18. 94.2824 -0.0709 142. 2362. 3. 18. 94.2348 4. 19. 94.2396 -0.0048 142. 2362. 3. 22. 94.2124 4. 19. 94.2087 0.0037 142. 2362. 3. 23. 94.2214 4. 20. 94.2937 -0.0723 142. 2362. 3. 24. 94.1651 4. 21. 94.2330 -0.0679