Next Page Previous Page Home Tools & Aids Search Handbook
2. Measurement Process Characterization
2.6. Case studies
2.6.1. Gauge study of resistivity probes

2.6.1.7.

Dataplot macros

Plot of wafer and day effect on repeatability standard deviations for run 1
reset data
reset plot control
reset i/o
dimension 500 30
label size 3
read mpc61.dat run wafer probe mo day op hum y sw
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters a b c d e f
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY
X3LABEL CODE FOR DAYS: A, B, C, D, E, F
TITLE RUN 1
plot sw z2 day subset run 1
Plot of wafer and day effect on repeatability standard deviations for run 2
reset data
reset plot control
reset i/o
dimension 500 30
label size 3
read mpc61.dat run wafer probe mo day op hum y sw
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters a b c d e f
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY
X3LABEL CODE FOR DAYS: A, B, C, D, E, F
TITLE RUN 2
plot sw z2 day subset run 2
Plot of repeatability standard deviations for 5 probes - run 1
reset data
reset plot control
reset i/o
dimension 500 30
label size 3
read mpc61.dat run wafer probe mo day op hum y sw
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters 1 2 3 4 5
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE
X3LABEL CODE FOR PROBES: 1= SRM1; 2= 281; 3=283; 4=2062; 5=2362
TITLE RUN 1
plot sw z2 probe subset run 1
Plot of repeatability standard deviations for 5 probes - run 2
reset data
reset plot control
reset i/o
dimension 500 30
label size 3
read mpc61.dat run wafer probe mo day op hum y sw
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters 1 2 3 4 5
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE
X3LABEL CODE FOR PROBES: 1= SRM1; 2= 281; 3=283; 4=2062; 5=2362
TITLE RUN 2
plot sw z2 probe subset run 2
Plot of differences from the wafer mean for 5 probes - run 1
reset data
reset plot control
reset i/o
dimension 500 30
read mpc61a.dat wafer probe d1 d2
let biasrun1 = mean d1 subset probe 2362
print biasrun1
title GAUGE STUDY FOR 5 PROBES
Y1LABEL OHM.CM
lines dotted dotted dotted dotted dotted solid
characters 1 2 3 4 5 blank
xlimits 137 143
let zero = pattern 0 for I = 1 1 30
x1label DIFFERENCES AMONG PROBES VS WAFER (RUN 1)
plot d1 wafer probe and
plot zero wafer
Plot of differences from the wafer mean for 5 probes - run 2
reset data
reset plot control
reset i/o
dimension 500 30
read mpc61a.dat wafer probe d1 d2
let biasrun2 = mean d2 subset probe 2362
print biasrun2
title GAUGE STUDY FOR 5 PROBES
Y1LABEL OHM.CM
lines dotted dotted dotted dotted dotted solid
characters 1 2 3 4 5 blank
xlimits 137 143
let zero = pattern 0 for I = 1 1 30
x1label DIFFERENCES AMONG PROBES VS WAFER (RUN 2)
plot d2 wafer probe and
plot zero wafer
Plot of averages by day showing reproducibility and stability for measurements made with probe #2362 on 5 wafers
reset data
reset plot control
reset i/o
dimension 300 50
label size 3
read mcp61b.dat  wafer probe mo1 day1 y1 mo2 day2 y2 diff
let t = mo1+(day1-1)/31.
let t2= mo2+(day2-1)/31.
x3label WAFER 138
multiplot 3 2
plot y1 t subset wafer 138 and
plot y2 t2 subset wafer 138
x3label wafer 139
plot y1 t subset wafer 139 and
plot y2 t2 subset wafer 139
x3label WAFER 140
plot y1 t subset wafer 140 and
plot y2 t2 subset wafer 140
x3label WAFER 140
plot y1 t subset wafer 141 and
plot y2 t2 subset wafer 141
x3label WAFER 142
plot y1 t subset wafer 142 and
plot y2 t2 subset wafer 142
Home Tools & Aids Search Handbook Previous Page Next Page