2. Measurement Process Characterization
2.6. Case studies
2.6.2. Check standard for resistivity measurements
2.6.2.1. Background and data

2.6.2.1.1.

Database for resistivity check standard

Description of check standard

A single wafer (#137), chosen at random from a batch of 130 wafers, is the check standard for resistivity measurements at the 100 ohm.cm level at the National Institute of Standards and Technology. The average of six measurements at the center of the wafer is the check standard value for one occasion, and the standard deviation of the six measurements is the short-term standard deviation. The columns of the database contain the following:

1. Crystal ID
2. Check standard ID
3. Month
4. Day
5. Hour
6. Minute
7. Operator
8. Humidity
9. Probe ID
10. Temperature
11. Check standard value
12. Short-term standard deviation
13. Degrees of freedom

Database of measurements on check standard

Crystal Waf Mo Da Hr Mn Op Hum Probe Temp Avg Stddev DF

51939 137 03 24 18 01 drr 42 2362 23.003 97.070 0.085 5

51939 137 03 25 12 41 drr 35 2362 23.115 97.049 0.052 5

51939 137 03 25 15 57 drr 33 2362 23.196 97.048 0.038 5

51939 137 03 28 10 10 JMT 47 2362 23.383 97.084 0.036 5

51939 137 03 28 13 31 JMT 44 2362 23.491 97.106 0.049 5

51939 137 03 28 17 33 drr 43 2362 23.352 97.014 0.036 5

51939 137 03 29 14 40 drr 36 2362 23.202 97.047 0.052 5

51939 137 03 29 16 33 drr 35 2362 23.222 97.078 0.117 5

51939 137 03 30 05 45 JMT 32 2362 23.337 97.065 0.085 5

51939 137 03 30 09 26 JMT 33 2362 23.321 97.061 0.052 5

51939 137 03 25 14 59 drr 34 2362 22.993 97.060 0.060 5

51939 137 03 31 10 10 JMT 37 2362 23.164 97.102 0.048 5

51939 137 03 31 13 00 JMT 37 2362 23.169 97.096 0.026 5

51939 137 03 31 15 32 JMT 35 2362 23.156 97.035 0.088 5

51939 137 04 01 13 05 JMT 34 2362 23.097 97.114 0.031 5

51939 137 04 01 15 32 JMT 34 2362 23.127 97.069 0.037 5

51939 137 04 01 10 32 JMT 48 2362 22.963 97.095 0.032 5

51939 137 04 06 14 38 JMT 49 2362 23.454 97.088 0.056 5

51939 137 04 07 10 50 JMT 34 2362 23.285 97.079 0.067 5

51939 137 04 07 15 46 JMT 33 2362 23.123 97.016 0.116 5

51939 137 04 08 09 37 JMT 33 2362 23.373 97.051 0.046 5

51939 137 04 08 12 53 JMT 33 2362 23.296 97.070 0.078 5

51939 137 04 08 15 03 JMT 33 2362 23.218 97.065 0.040 5

51939 137 04 11 09 30 JMT 36 2362 23.415 97.111 0.038 5

51939 137 04 11 11 34 JMT 35 2362 23.395 97.073 0.039 5