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2. Measurement Process Characterization
2.6. Case studies
2.6.3. Evaluation of type A uncertainty
2.6.3.1. Background and data

2.6.3.1.2.

Measurements on wiring configurations

Check wafers were measured with the probe wired in two configurations Measurements of resistivity (ohm.cm) were made according to an ASTM Standard Test Method (F4) to identify differences between 2 wiring configurations for probe #2362. The check standards for the study were five wafers selected at random from a batch of wafers cut from one silicon crystal doped with phosphorous to give a nominal resistivity of 100 ohm.cm.
Description of database The data are averages of K = 6 days' measurements and J = 6 repetitions at the center of each wafer. There are L = 2 complete runs, separated by two months time, on each wafer.

The data recorded in the 10 columns are:

  1. Wafer
  2. Probe
  3. Average - configuration A; run 1
  4. Standard deviation - configuration A; run 1
  5. Average - configuration B; run 1
  6. Standard deviation - configuration B; run 1
  7. Average - configuration A; run 2
  8. Standard deviation - configuration A; run 2
  9. Average - configuration B; run 2
  10. Standard deviation - configuration B; run 2
Wafer Probe Config A-run1   Config B-run1   Config A-run2   Config B-run2.

138. 2362.  95.1162 0.0480  95.0993 0.0466  95.1687 0.0785  95.1589 0.0642
138. 2362.  95.0569 0.0577  95.0657 0.0450  95.1564 0.0430  95.1705 0.0730
138. 2362.  95.0598 0.0516  95.0622 0.0664  95.1354 0.0983  95.1221 0.0695
138. 2362.  95.1487 0.0386  95.1625 0.0311  95.0422 0.0773  95.0513 0.0840
138. 2362.  95.0743 0.0256  95.0599 0.0488  95.1354 0.0587  95.1531 0.0482
138. 2362.  95.1010 0.0420  95.0944 0.0393  95.1075 0.0776  95.1537 0.0230
139. 2362.  99.2939 0.0818  99.3018 0.0905  99.3408 0.1279  99.3637 0.1025
139. 2362.  99.3234 0.0723  99.3488 0.0350  99.3116 0.1131  99.3881 0.0451
139. 2362.  99.2748 0.0756  99.3571 0.1993  99.3241 0.0519  99.3737 0.0699
139. 2362.  99.3512 0.0475  99.3512 0.1286  99.2991 0.0903  99.3066 0.0709
139. 2362.  99.2350 0.0517  99.2255 0.0738  99.3049 0.0783  99.3040 0.0744
139. 2362.  99.3574 0.0485  99.3605 0.0459  99.2782 0.0718  99.3680 0.0470
140. 2362.  96.0771 0.1024  96.0915 0.1257  96.0793 0.0996  96.1041 0.0890
140. 2362.  95.9976 0.0943  96.0057 0.0806  96.1115 0.0533  96.0774 0.0983
140. 2362.  96.0148 0.0622  96.0244 0.0833  96.0803 0.0364  96.1004 0.0758
140. 2362.  96.0397 0.0702  96.0422 0.0738  96.0411 0.0768  96.0677 0.0663
140. 2362.  96.0407 0.0627  96.0738 0.0800  96.0988 0.1042  96.0585 0.0960
140. 2362.  96.0445 0.0622  96.0557 0.1129  96.0482 0.0868  96.0062 0.0895
141. 2362. 101.0471 0.0320 101.0241 0.0670 101.1353 0.0585 101.1156 0.1027
141. 2362. 101.0224 0.1020 101.0660 0.1030 101.1201 0.0868 101.1077 0.1141
141. 2362. 101.0702 0.0580 101.0509 0.0710 101.0946 0.0855 101.0455 0.1070
141. 2362. 101.0904 0.1049 101.0983 0.0894 100.9977 0.0645 101.0274 0.0666
141. 2362. 101.0626 0.0702 101.0614 0.0849 101.0963 0.0638 101.1106 0.0788
141. 2362. 101.0686 0.0661 101.0811 0.0490 101.0300 0.0549 101.1073 0.0663
142. 2362.  94.2437 0.0503  94.2088 0.0815  94.2052 0.0813  94.2487 0.0719
142. 2362.  94.2115 0.0919  94.2043 0.1176  94.2824 0.0605  94.2886 0.0499
142. 2362.  94.2348 0.0282  94.2324 0.0519  94.2396 0.0882  94.2739 0.1075
142. 2362.  94.2124 0.0513  94.2347 0.0694  94.2087 0.0702  94.2023 0.0416
142. 2362.  94.2214 0.0627  94.2416 0.0757  94.2937 0.0591  94.2600 0.0731
142. 2362.  94.1651 0.1010  94.2287 0.0919  94.2330 0.0556  94.2406 0.0651
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