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Dataplot Commands for Lithographic Process Data
Invoke Dataplot, set defaults, read data
.
.  Starting Lithographic Process Case Study
.
. Setting Dataplot defaults
reset data
reset plot control
erase
dimension 100 variables
.  Finished Setting Defaults
.
. Starting Step 1.1
.
SKIP 25
read LITHOGRA.DAT cassette wafer site width runseq
skip 0
. Finished Step 1.1: Page Back for Output
Summary
.
.
. Starting Step 2.1 - Summary of Response Variable
.
summary width
. Finished Step 2.1: Page Back for Output
4-Plot
.
. Starting Step 2.2 - Generate a 4-plot
.
4-plot width
. Finished Step 2.2: Page Back for Output
Run Sequence Plot
.
. Starting Step 2.3 - Generate a run sequence plot
.
y1label width
x1label sequence
run sequence plot width
Scatter Plot (Width vs Cassette)
.
. Starting Step 3.1 - Generate a scatter plot of response versus
.                     cassette
.
y1label width
x1label cassette
line blank all
character x all
xlimits 0 30
xtic offset 0 1
plot width cassette cassette
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 3.1: Page Back for Output
Box Plot (Width vs Cassette)
.
. Starting Step 3.2 - Generate a box plot of response versus
.                     cassette
.
y1label width
x1label cassette
line box plot
character box plot
xlimits 0 30
xtic offset 0 1
fences on
box plot width cassette
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 3.2: Page Back for Output
Scatter Plot (Width vs Wafer)
.
. Starting Step 3.3 - Generate a scatter plot of response versus
.                     wafer
.
y1label width
x1label wafer
line blank all
character x all
xlimits 1 3
xtic offset 1 1
major xtic mark number 3
minor xtic mark number 0
plot width wafer wafer
line solid all
character blank all
xlimits 
xtic offset
major xtic mark number
minor xtic mark number
. Finished Step 3.3: Page Back for Output
Box Plot (Width vs Wafer)
.
. Starting Step 3.4 - Generate a box plot of response versus
.                     wafer
.
y1label width
x1label wafer
line box plot
character box plot
xlimits 1 3
xtic offset 1 1
major xtic mark number 3
minor xtic mark number 0
fences on
box plot width wafer
line solid all
character blank all
xlimits 
xtic offset
major xtic mark number
minor xtic mark number
. Finished Step 3.4: Page Back for Output
Scatter Plot (Width vs Site)
.
. Starting Step 3.5 - Generate a scatter plot of response versus
.                     site
.
y1label width
x1label site
line blank all
character x all
xlimits 1 5
xtic offset 1 1
major xtic mark number 5
minor xtic mark number 0
xtic mark label format alpha
xtic mark label content top left center right bottom
plot width site site
line solid all
character blank all
xlimits 
xtic offset
minor xtic mark number
xtic mark label format 
xtic mark label content
. Finished Step 3.5: Page Back for Output
Box Plot (Width vs Site)
.
. Starting Step 3.6 - Generate a box plot of response versus
.                     site
.
y1label width
x1label site
line box plot
character box plot
xlimits 1 5
xtic offset 1 1
major xtic mark number 5
minor xtic mark number 0
xtic mark label format alpha
xtic mark label content top left center right bottom
fences on
box plot width site
line solid all
character blank all
xlimits 
xtic offset
major xtic mark number
minor xtic mark number
xtic mark label format
. Finished Step 3.6: Page Back for Output
Dex Mean Plot
.
. Starting Step 3.7 - Generate a dex mean plot of response versus
.                     all 3 factors
.
y1label width
x1label factors
line blank solid
character x BLANK
xlimits 1 3
xtic offset 1 1
major xtic mark number 3
minor xtic mark number 0
xtic mark label format alpha
xtic mark label content cassette wafer site
dex mean plot width cassette wafer site 
line solid all
character blank all
xlimits 
xtic offset
major xtic mark number
minor xtic mark number
xtic mark label format
. Finished Step 3.7: Page Back for Output
Dex SD Plot
.
. Starting Step 3.8 - Generate a dex sd plot of response versus
.                     all 3 factors
.
y1label width
x1label factors
line blank solid
character x BLANK
xlimits 1 3
xtic offset 1 1
major xtic mark number 3
minor xtic mark number 0
xtic mark label format alpha
xtic mark label content cassette wafer site
dex sd plot width cassette wafer site 
line solid all
character blank all
xlimits 
xtic offset
major xtic mark number
minor xtic mark number
xtic mark label format
. Finished Step 3.8: Page Back for Output
ANOVA
.
. Starting Step 4.1 - ANOVA
.
anova width cassette wafer site
. Finished Step 4.1: Page Back for Output
Moving Mean Control Chart
.
. Starting Step 4.2 - Moving mean control chart
.
y1label mean of line width
x1label
line solid all
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 450
xtic offset 4 5
moving mean control chart width
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 10
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
movedata a1 a2
text Target
movedata a1 a3
text UCL
movedata a1 a4
text LCL
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 4.2: Page Back for Output
Moving Range Control Chart
.
. Starting Step 4.3 - Moving range control chart
.
y1label range of line width
x1label 
line solid all
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 450
xtic offset 4 5
ytic offset 0.2 0.2
moving range control chart width 
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 10
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
movedata a1 a2
text Target
movedata a1 a3
text UCL
movedata a1 a4
text LCL
line solid all
character blank all
xlimits 
xtic offset
ytic offset
. Finished Step 4.3: Page Back for Output
Mean Control Chart (Wafer)
.
. Starting Step 4.4 - Mean control chart for wafer
.
y1label mean of line width
x1label wafer
line solid all
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 90
xtic offset 4 5
let xwafer = sequence 1 5 1 90
mean control chart width xwafer
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 7
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
movedata a1 a2
text Target
movedata a1 a3
text UCL
movedata a1 a4
text LCL
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 4.4: Page Back for Output
SD Control Chart (Wafer)
.
. Starting Step 4.5 - SD control chart for wafer
.
y1label sd of line width
x1label wafer
line solid all
line solid solid solid blank
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 90
xtic offset 4 5
ytic offset 0.05 0.05
let xwafer = sequence 1 5 1 90
s control chart width xwafer
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 7
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
movedata a1 a2
text Target
movedata a1 a3
text UCL
. movedata a1 a4
. text LCL
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 4.5: Page Back for Output
Mean Control Chart (Cassette)
.
. Starting Step 4.6 - Mean control chart for cassette
.
y1label mean of line width
x1label cassette
line solid all
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 30
xtic offset 1 2
mean control chart width cassette
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 4
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
movedata a1 a2
text Target
movedata a1 a3
text UCL
movedata a1 a4
text LCL
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 4.6: Page Back for Output
SD Control Chart (Cassette)
.
. Starting Step 4.7 - SD control chart for cassette
.
y1label sd of line width
x1label wafer
line solid all
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 30
xtic offset 1 2
s control chart width cassette
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 4
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
movedata a1 a2
text Target
movedata a1 a3
text UCL
movedata a1 a4
text LCL
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 4.7: Page Back for Output
Mean Control Chart using Lot-to-Lot Variation
.
. Starting Step 4.8 - Mean control chart for cassette,
.                     but use cassette-cassette variation
.                     for control limits.
.
y1label mean of line width
x1label cassette
line solid all
character x BLANK BLANK BLANK BLANK BLANK BLANK
xlimits 0 30
xtic offset 1 2
device 1 off
device 2 off
mean plot width cassette
device 1 on
device 2 on
let ytemp = yplot
retain ytemp  subset tagplot = 1
let a = standard deviation ytemp
let target = mean width
let usl = target + 3*a
let lsl = target - 3*a
mean control chart width cassette
let a1 = maximum xplot subset tagplot = 2
let a1 = a1 + 4
let a2 = maximum yplot subset tagplot = 2
let a3 = maximum yplot subset tagplot = 3
let a4 = maximum yplot subset tagplot = 4
let a6 = maximum yplot subset tagplot = 6
let a7 = maximum yplot subset tagplot = 7
movedata a1 a2
text Target
movedata a1 a3
text UCL
movedata a1 a4
text LCL
movedata a1 a6
text UCL:lot-to-lot
movedata a1 a7
text LCL:lot-to-lot
line solid all
character blank all
xlimits 
xtic offset
. Finished Step 4.8: Page Back for Output
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