3.
Production
Process Characterization
3.5. Case Studies 3.5.1. Furnace Case Study
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The next part of the analysis is to break down the sources of variation. | |||
Box Plot by Run | The following is a box plot of the thickness by run number. | ||
Conclusions From Box Plot |
We can make the following conclusions from this box plot.
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Box Plot by Furnace Location | The following is a box plot of the thickness by furnace location. | ||
Conclusions From Box Plot |
We can make the following conclusions from this box plot.
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Box Plot by Wafer | The following is a box plot of the thickness by wafer. | ||
Conclusion From Box Plot | From this box plot, we conclude that wafer does not seem to be a significant factor. | ||
Block Plot |
In order to show the combined effects of run, furnace location, and
wafer, we draw a block
plot of the thickness. Note that for aesthetic reasons, we have
used connecting lines rather than enclosing boxes.
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Conclusions From Block Plot |
We can draw the following conclusions from this block plot.
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