3. Production Process Characterization
3.5. Case Studies
3.5.1. Furnace Case Study

3.5.1.6.

Work This Example Yourself

View Dataplot Macro for this Case Study

This page allows you to repeat the analysis outlined in the case study description on the previous page using Dataplot, if you have downloaded and installed it. Output from each analysis step below will be displayed in one or more of the Dataplot windows. The four main windows are the Output window, the Graphics window, the Command History window and the Data Sheet window. Across the top of the main windows there are menus for executing Dataplot commands. Across the bottom is a command entry window where commands can be typed in.

Data Analysis Steps	Results and Conclusions
Click on the links below to start Dataplot and run this case study yourself. Each step may use results from previous steps, so please be patient. Wait until the software verifies that the current step is complete before clicking on the next step.	The links in this column will connect you with more detailed information about each analysis step from the case study description.
1. Get set up and started. 1. Read in the data.	1. You have read 4 columns of numbers into Dataplot, variables run, zone, wafer, and filmthic.
2. Analyze the response variable. 1. Normal probability plot, box plot, and histogram of film thickness. 2. Compute summary statistics and quantiles of film thickness. 3. Perform a capability analysis.	1. Initial plots indicate that the film thickness is reasonably approximated by a normal distribution with no significant outliers. 2. Mean is 563.04 and standard deviation is 25.38. Data range from 487 to 634. 3. Capability analysis indicates that the process is capable.
3. Identify Sources of Variation. 1. Generate a box plot by run. 2. Generate a box plot by furnace location. 3. Generate a box plot by wafer. 4. Generate a block plot.	1. The box plot shows significant variation both between runs and within runs. 2. The box plot shows significant variation within furnace location but not between furnace location. 3. The box plot shows no significant effect for wafer. 4. The block plot shows both run and furnace location are significant.
4. Perform an Analysis of Variance 1. Perform the analysis of variance and compute the components of variance.	1. The results of the ANOVA are summarized in an ANOVA table and a components of variance table.