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2. Measurement Process Characterization
2.6. Case studies
2.6.1. Gauge study of resistivity probes

2.6.1.5. Differences among 5 probes

Run 1 - Graph of differences from wafer averages for each of 5 probes showing that probes #2062 and #2362 are biased low relative to the other probes
Plot of Run 1: Graph of differences from wafer averages
 for each of 5 probes

Symbols for probes: 1 = #1; 2 = #281; 3 = #283; 4 = #2062; 5 = #2362

Run 2 - Graph of differences from wafer averages for each of 5 probes showing that probe #2362 continues to be biased low relative to the other probes
Plot of Run 2: Graph of differences from wafer averages
 for each of 5 probes

Symbols for probes: 1 = #1; 2 = #281; 3 = #283; 4 = #2062; 5 = #2362

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