2. Measurement Process Characterization
2.6. Case studies
2.6.1. Gauge study of resistivity probes

## Dataplot macros

Plot of wafer and day effect on repeatability standard deviations for run 1
```reset data
reset plot control
reset i/o
dimension 30 columns
label size 3
skip 50
read mpc61.dat run wafer probe mo day op hum y sw
skip 0
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters a b c d e f
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY
X3LABEL CODE FOR DAYS: A, B, C, D, E, F
TITLE RUN 1
plot sw z2 day subset run 1
```
Plot of wafer and day effect on repeatability standard deviations for run 2
```reset data
reset plot control
reset i/o
dimension 30 columns
label size 3
skip 50
read mpc61.dat run wafer probe mo day op hum y sw
skip 0
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters a b c d e f
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY
X3LABEL CODE FOR DAYS: A, B, C, D, E, F
TITLE RUN 2
plot sw z2 day subset run 2
```
Plot of repeatability standard deviations for 5 probes - run 1
```reset data
reset plot control
reset i/o
dimension 30 columns
label size 3
skip 50
read mpc61.dat run wafer probe mo day op hum y sw
skip 0
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters 1 2 3 4 5
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE
X3LABEL CODE FOR PROBES: 1= SRM1; 2= 281; 3=283; 4=2062; 5=2362
TITLE RUN 1
plot sw z2 probe subset run 1
```
Plot of repeatability standard deviations for 5 probes - run 2
```reset data
reset plot control
reset i/o
dimension 30 columns
label size 3
skip 50
read mpc61.dat run wafer probe mo day op hum y sw
skip 0
y1label ohm.cm
title GAUGE STUDY
lines blank all
let z = pattern 1 2 3 4 5 6 for I = 1 1 300
let z2 = wafer + z/10 -0.25
characters 1 2 3 4 5
X1LABEL WAFERS
X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE
X3LABEL CODE FOR PROBES: 1= SRM1; 2= 281; 3=283; 4=2062; 5=2362
TITLE RUN 2
plot sw z2 probe subset run 2
```
Plot of differences from the wafer mean for 5 probes - run 1
```reset data
reset plot control
reset i/o
dimension 30 columns
skip 25
read mpc61a.dat wafer probe d1 d2
skip 0
let biasrun1 = mean d1 subset probe 2362
print biasrun1
title GAUGE STUDY FOR 5 PROBES
Y1LABEL OHM.CM
lines dotted dotted dotted dotted dotted solid
characters 1 2 3 4 5 blank
xlimits 137 143
let zero = pattern 0 for I = 1 1 30
x1label DIFFERENCES AMONG PROBES VS WAFER (RUN 1)
plot d1 wafer probe and
plot zero wafer
```
Plot of differences from the wafer mean for 5 probes - run 2
```reset data
reset plot control
reset i/o
dimension 30 columns
skip 25
read mpc61a.dat wafer probe d1 d2
skip 0
let biasrun2 = mean d2 subset probe 2362
print biasrun2
title GAUGE STUDY FOR 5 PROBES
Y1LABEL OHM.CM
lines dotted dotted dotted dotted dotted solid
characters 1 2 3 4 5 blank
xlimits 137 143
let zero = pattern 0 for I = 1 1 30
x1label DIFFERENCES AMONG PROBES VS WAFER (RUN 2)
plot d2 wafer probe and
plot zero wafer
```
Plot of averages by day showing reproducibility and stability for measurements made with probe #2362 on 5 wafers
```reset data
reset plot control
reset i/o
label size 3
dimension 50 columns
skip 25
read mcp61b.dat  wafer probe mo1 day1 y1 mo2 day2 y2 diff
skip 0
let t = mo1+(day1-1)/31.
let t2= mo2+(day2-1)/31.
x3label WAFER 138
multiplot 3 2
plot y1 t subset wafer 138 and
plot y2 t2 subset wafer 138
x3label wafer 139
plot y1 t subset wafer 139 and
plot y2 t2 subset wafer 139
x3label WAFER 140
plot y1 t subset wafer 140 and
plot y2 t2 subset wafer 140
x3label WAFER 140
plot y1 t subset wafer 141 and
plot y2 t2 subset wafer 141
x3label WAFER 142
plot y1 t subset wafer 142 and
plot y2 t2 subset wafer 142
```