2.
Measurement Process Characterization
2.6. Case studies 2.6.1. Gauge study of resistivity probes
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Plot of wafer and day effect on repeatability standard deviations for run 1 |
reset data reset plot control reset i/o dimension 30 columns label size 3 skip 50 read mpc61.dat run wafer probe mo day op hum y sw skip 0 y1label ohm.cm title GAUGE STUDY lines blank all let z = pattern 1 2 3 4 5 6 for I = 1 1 300 let z2 = wafer + z/10 -0.25 characters a b c d e f X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY X3LABEL CODE FOR DAYS: A, B, C, D, E, F TITLE RUN 1 plot sw z2 day subset run 1 |
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Plot of wafer and day effect on repeatability standard deviations for run 2 |
reset data reset plot control reset i/o dimension 30 columns label size 3 skip 50 read mpc61.dat run wafer probe mo day op hum y sw skip 0 y1label ohm.cm title GAUGE STUDY lines blank all let z = pattern 1 2 3 4 5 6 for I = 1 1 300 let z2 = wafer + z/10 -0.25 characters a b c d e f X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND DAY X3LABEL CODE FOR DAYS: A, B, C, D, E, F TITLE RUN 2 plot sw z2 day subset run 2 |
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Plot of repeatability standard deviations for 5 probes - run 1 |
reset data reset plot control reset i/o dimension 30 columns label size 3 skip 50 read mpc61.dat run wafer probe mo day op hum y sw skip 0 y1label ohm.cm title GAUGE STUDY lines blank all let z = pattern 1 2 3 4 5 6 for I = 1 1 300 let z2 = wafer + z/10 -0.25 characters 1 2 3 4 5 X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE X3LABEL CODE FOR PROBES: 1= SRM1; 2= 281; 3=283; 4=2062; 5=2362 TITLE RUN 1 plot sw z2 probe subset run 1 |
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Plot of repeatability standard deviations for 5 probes - run 2 |
reset data reset plot control reset i/o dimension 30 columns label size 3 skip 50 read mpc61.dat run wafer probe mo day op hum y sw skip 0 y1label ohm.cm title GAUGE STUDY lines blank all let z = pattern 1 2 3 4 5 6 for I = 1 1 300 let z2 = wafer + z/10 -0.25 characters 1 2 3 4 5 X1LABEL WAFERS X2LABEL REPEATABILITY STANDARD DEVIATIONS BY WAFER AND PROBE X3LABEL CODE FOR PROBES: 1= SRM1; 2= 281; 3=283; 4=2062; 5=2362 TITLE RUN 2 plot sw z2 probe subset run 2 |
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Plot of differences from the wafer mean for 5 probes - run 1 |
reset data reset plot control reset i/o dimension 30 columns skip 25 read mpc61a.dat wafer probe d1 d2 skip 0 let biasrun1 = mean d1 subset probe 2362 print biasrun1 title GAUGE STUDY FOR 5 PROBES Y1LABEL OHM.CM lines dotted dotted dotted dotted dotted solid characters 1 2 3 4 5 blank xlimits 137 143 let zero = pattern 0 for I = 1 1 30 x1label DIFFERENCES AMONG PROBES VS WAFER (RUN 1) plot d1 wafer probe and plot zero wafer |
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Plot of differences from the wafer mean for 5 probes - run 2 |
reset data reset plot control reset i/o dimension 30 columns skip 25 read mpc61a.dat wafer probe d1 d2 skip 0 let biasrun2 = mean d2 subset probe 2362 print biasrun2 title GAUGE STUDY FOR 5 PROBES Y1LABEL OHM.CM lines dotted dotted dotted dotted dotted solid characters 1 2 3 4 5 blank xlimits 137 143 let zero = pattern 0 for I = 1 1 30 x1label DIFFERENCES AMONG PROBES VS WAFER (RUN 2) plot d2 wafer probe and plot zero wafer |
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Plot of averages by day showing reproducibility and stability for measurements made with probe #2362 on 5 wafers |
reset data reset plot control reset i/o label size 3 dimension 50 columns skip 25 read mcp61b.dat wafer probe mo1 day1 y1 mo2 day2 y2 diff skip 0 let t = mo1+(day1-1)/31. let t2= mo2+(day2-1)/31. x3label WAFER 138 multiplot 3 2 plot y1 t subset wafer 138 and plot y2 t2 subset wafer 138 x3label wafer 139 plot y1 t subset wafer 139 and plot y2 t2 subset wafer 139 x3label WAFER 140 plot y1 t subset wafer 140 and plot y2 t2 subset wafer 140 x3label WAFER 140 plot y1 t subset wafer 141 and plot y2 t2 subset wafer 141 x3label WAFER 142 plot y1 t subset wafer 142 and plot y2 t2 subset wafer 142 |