2.
Measurement Process Characterization
2.6. Case studies 2.6.2. Check standard for resistivity measurements 2.6.2.2. Analysis and interpretation


Example  The table below illustrates the computation of repeatability and level2 standard deviations from measurements on a check standard. The check standard measurements are resistivities at the center of a 100 ohm.cm wafer. There are J = 6 repetitions per day and K = 5 days for this example.  
Table of data, averages, and repeatability standard deviations 
